Title :
A predictive analytical model of 3D MIM capacitors for RC IC
Author :
Segura, Noël ; Cremer, Sébastien ; Gloria, Daniel ; Ciampolini, Lorenzo ; Picollet, Eric ; Minondo, Michel
Author_Institution :
STMicroelectronics, Crolles
Abstract :
This paper reports a predictive analytical transmission RLC model of 3D MIM capacitors in a 0.13 mum BICMOS technology. The aim of this predictive model is to help circuit design with compatible CPU time. It allows adjusting process parameters in order to optimize electrical features. The model has been compared with electromagnetic simulations and S-parameters measurements up to 42 GHz.
Keywords :
BiCMOS integrated circuits; MIM devices; S-parameters; capacitors; equivalent circuits; integrated circuit modelling; 3D MIM capacitors; BICMOS technology; S-parameters; adjusting process parameters; integrated circuit modelling; size 0.13 mum; Analytical models; BiCMOS integrated circuits; Circuit simulation; Circuit synthesis; Electromagnetic measurements; Electromagnetic modeling; Integrated circuit modeling; MIM capacitors; Predictive models; Scattering parameters;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4418998
