DocumentCode
2604292
Title
A predictive analytical model of 3D MIM capacitors for RC IC
Author
Segura, Noël ; Cremer, Sébastien ; Gloria, Daniel ; Ciampolini, Lorenzo ; Picollet, Eric ; Minondo, Michel
Author_Institution
STMicroelectronics, Crolles
fYear
2007
fDate
10-12 Dec. 2007
Firstpage
553
Lastpage
556
Abstract
This paper reports a predictive analytical transmission RLC model of 3D MIM capacitors in a 0.13 mum BICMOS technology. The aim of this predictive model is to help circuit design with compatible CPU time. It allows adjusting process parameters in order to optimize electrical features. The model has been compared with electromagnetic simulations and S-parameters measurements up to 42 GHz.
Keywords
BiCMOS integrated circuits; MIM devices; S-parameters; capacitors; equivalent circuits; integrated circuit modelling; 3D MIM capacitors; BICMOS technology; S-parameters; adjusting process parameters; integrated circuit modelling; size 0.13 mum; Analytical models; BiCMOS integrated circuits; Circuit simulation; Circuit synthesis; Electromagnetic measurements; Electromagnetic modeling; Integrated circuit modeling; MIM capacitors; Predictive models; Scattering parameters;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location
Washington, DC
Print_ISBN
978-1-4244-1507-6
Electronic_ISBN
978-1-4244-1508-3
Type
conf
DOI
10.1109/IEDM.2007.4418998
Filename
4418998
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