Title :
Displays, Sensors, and MEMS - TFTs, Displays and Memories
Author :
Hatano, Mutsuko ; Milne, William
Author_Institution :
Hitachi, Ltd.
Keywords :
Displays; Fabrication; Frequency; Indium gallium zinc oxide; Micromechanical devices; Production; Pulp manufacturing; Ring oscillators; Thin film transistors; Zinc oxide;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4419004