Title :
Continuous-wave operation of InGaN multiple quantum well laser diodes on copper substrates obtained by laser lift-off
Author :
Kneissl, M. ; Wong, W.S. ; Romano, L.T. ; Treat, D.W. ; Schmidt, T. ; Teepe, M. ; Johnson, N.M.
Author_Institution :
Xerox Palo Alto Res. Center, CA, USA
Abstract :
In recent years tremendous progress has been made in the development of AlGaInN laser diodes (LDs) and the commercialization of violet laser diodes has just recently begun. An important factor in order to improve laser diode performance and lifetime was the reduction of the dislocation density in the GaN material. In this paper we will report on the performance characteristics of cw laser diodes grown by metal organic chemical vapor deposition on laterally epitaxially overgrown GaN on sapphire substrates (ELOG). The InGaAlN films were processed into ridge-waveguide lasers with CAIBE etched mirrors and a high reflective coating on the backside facet.
Keywords :
III-V semiconductors; MOCVD; gallium compounds; indium compounds; laser materials processing; optical fabrication; quantum well lasers; ridge waveguides; waveguide lasers; AlGaInN laser diodes; GaN; InGaAlN; InGaAlN films; InGaN; InGaN multiple quantum well laser diode; backside facet; continuous-wave operation; copper substrates; cw laser diodes; high reflective coating; laser diode lifetime; laser diode performance; laser lift-off; laterally epitaxially; laterally epitaxially overgrown GaN; metal organic chemical vapor deposition; ridge-waveguide lasers; sapphire substrates; violet laser diodes; Chemical lasers; Chemical vapor deposition; Commercialization; Diode lasers; Gallium nitride; Optical films; Optical materials; Organic chemicals; Quantum well lasers; Substrates;
Conference_Titel :
Semiconductor Laser Conference, 2000. Conference Digest. 2000 IEEE 17th International
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-6259-4
DOI :
10.1109/ISLC.2000.882311