Effect of process variation on field emission characteristic in surface conduction electron-emitters

Author

Lo, Hsiang-Yu ; Li, Yiming ; Chao, Hsueh-Yung ; Tsai, Chih-Hao ; Pan, Fu-Ming

Author_Institution

Dept. of Commun. Eng., Nat. Chiao Tung Univ., Hsinchu

fYear

2007

fDate

2-5 Aug. 2007

Firstpage

353

Lastpage

356

Abstract

In this work, we explore the effect of process variation on field emission characteristics in surface conduction electron-emitters. The structure of palladium thin-film emitter is fabricated on the substrate and the nanometer scaled gap is formed by the focused ion beam (FIB) technique. Different shapes of nanogaps due to the process variations are investigated by the experiment and 3D Maxwell particle-in-cell simulation. Four deformation structures are examined, and it is found that the Type 1 exhibits high emission efficiency due to a stronger electric field around the apex and larger the emission current among structures. The electron emission current is dependent upon the angle of inclination of surface.

Keywords

Maxwell equations; deformation; electrodes; electron field emission; focused ion beam technology; metallic thin films; nanotechnology; palladium; surface conductivity; 3D Maxwell particle-in-cell simulation; Pd; deformation structures; deformed palladium nanogaps; electron emission current; emission efficiency; field emission characteristics; focused ion beam technique; palladium thin-film emitter structure; process variation effect; surface conduction electron-emitters; Electrodes; Electron emission; Electron guns; Fabrication; Finite difference methods; Ion beams; Palladium; Substrates; Surface morphology; Transistors; focused ion beam; palladium; particle-in-cell simulation; process variation; surface conduction electron emitter;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on

Conference_Location

Hong Kong

Print_ISBN

978-1-4244-0607-4

Electronic_ISBN

978-1-4244-0608-1

Type

conf

DOI

10.1109/NANO.2007.4601207

Filename

4601207