Leak Detection of Integrated Circuits and Other Semiconductor Devices on Multilayer Circuit Boards

The radioisotope leak test has been modified to detect leaks, in integrated circuits and other devices mounted onto multilayer circuit boards, over the entire range from 10¿1 to 10¿8 atm. cc per second. The method combines radiation shielding techniques with three sequential tests using krypton-85. The test program has succeeded in detecting a significant number of leaky components on electronic boards for a high reliability space application.