Millimeter-sized nanomanipulator with sub-nanometer positioning resolution and large force output

Nanomanipulation in space-limited environments (e.g., inside SEM, and particularly in TEM) requires small-sized nano manipulators that are capable of producing sub-nanometer positioning resolutions and large output forces. This paper reports on a millimeter-sized MEMS (microelectromechanical systems) based nano manipulator with a positioning resolution of 0.15 nm and a motion range of plusmn2.55 mum. An amplification mechanism is employed to convert input displacements, generated by conventional electrostatic comb-drive microactuator, to achieve a high positioning resolution on the output side. The device has a high load driving capability, driving a load as high as 98 muN without sacrificing positioning performance. Testing results demonstrate that the mechanism has a high linearity (plusmn2.4%). A capacitive displacement sensor is integrated for detecting input displacements that are converted into output displacements via a minification ratio, allowing closed-loop controlled nanomanipulation. The MEMS-based nano-manipulators are applicable to the characterization/manipulation of nano-materials and construction of nano devices.