Title :
Instabilities in Double Dielectric Structures
Author :
Woods, Murray H.
Author_Institution :
RCA Laboratories, Princeton, N. J. 08540
Abstract :
Double dielectric structures are used in devices and integrated circuits for the purposes of stabilization and encapsulation, increased breakdown strength, or for active operation as in MNOS and MAOS memory transistors. Instabilities are shown to arise from polarization, alkali migration and fixed interface charges, conductivity differences and the formation of slow and fast oxide states due to the application of high electric fields in memory devices.
Keywords :
Conductivity; Dielectric breakdown; Dielectric devices; Dielectrics and electrical insulation; Electron traps; Laboratories; Metal-insulator structures; Polarization; Silicon; Threshold voltage;
Conference_Titel :
Reliability Physics Symposium, 1974. 12th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1974.362655