• DocumentCode
    2605027
  • Title

    Instabilities in Double Dielectric Structures

  • Author

    Woods, Murray H.

  • Author_Institution
    RCA Laboratories, Princeton, N. J. 08540
  • fYear
    1974
  • fDate
    27120
  • Firstpage
    259
  • Lastpage
    266
  • Abstract
    Double dielectric structures are used in devices and integrated circuits for the purposes of stabilization and encapsulation, increased breakdown strength, or for active operation as in MNOS and MAOS memory transistors. Instabilities are shown to arise from polarization, alkali migration and fixed interface charges, conductivity differences and the formation of slow and fast oxide states due to the application of high electric fields in memory devices.
  • Keywords
    Conductivity; Dielectric breakdown; Dielectric devices; Dielectrics and electrical insulation; Electron traps; Laboratories; Metal-insulator structures; Polarization; Silicon; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1974. 12th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1974.362655
  • Filename
    4208033