DocumentCode
2605027
Title
Instabilities in Double Dielectric Structures
Author
Woods, Murray H.
Author_Institution
RCA Laboratories, Princeton, N. J. 08540
fYear
1974
fDate
27120
Firstpage
259
Lastpage
266
Abstract
Double dielectric structures are used in devices and integrated circuits for the purposes of stabilization and encapsulation, increased breakdown strength, or for active operation as in MNOS and MAOS memory transistors. Instabilities are shown to arise from polarization, alkali migration and fixed interface charges, conductivity differences and the formation of slow and fast oxide states due to the application of high electric fields in memory devices.
Keywords
Conductivity; Dielectric breakdown; Dielectric devices; Dielectrics and electrical insulation; Electron traps; Laboratories; Metal-insulator structures; Polarization; Silicon; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1974. 12th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1974.362655
Filename
4208033
Link To Document