Assembly of nano optics by an integrated probe-based system

Author

Fok, L.M. ; Liu, Y.H. ; Li, Wen J.

Author_Institution

Dept. of Mech. & Autom. Eng., Chinese Univ. of Hong Kong, Hong Kong

fYear

2007

fDate

2-5 Aug. 2007

Firstpage

524

Lastpage

529

Abstract

Repeatable manipulation and auto-assembly of nano-scale components is a critical potential for future developments in nano optics, opto-electronics, hybrid microelectromechanical (MEMS) systems, and nano-scale devices. This paper focuses on the fabrication of nano structures using single probe with force feedback. The structures that are fabricated can be used for both rapid prototyping and for replication. A description of the manipulation system is presented along with a discussion on the basic manipulation capabilities. Force feedback has been employed, the vertical contact force was determined by a force control system during manipulation.

Keywords

integrated optics; micro-optics; nanotechnology; optical fabrication; replica techniques; MEMS; force control system; force feedback; hybrid microelectromechanical systems; integrated probe-based system; manipulation system; nanooptics assembly; optical fabrication; optoelectronics; rapid prototyping; replication; vertical contact force; Assembly systems; Force feedback; Integrated optics; Micromechanical devices; Nanoscale devices; Optical device fabrication; Optical devices; Optical feedback; Probes; Prototypes; Atomic Force Microscope; nano optics; nanolithography; probe-based manipulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on

Conference_Location

Hong Kong

Print_ISBN

978-1-4244-0607-4

Electronic_ISBN

978-1-4244-0608-1

Type

conf

DOI

10.1109/NANO.2007.4601246

Filename

4601246