DocumentCode :
2605398
Title :
Miniature Moisture Sensors for In-Package Use by the Microelectronics Industry
Author :
Meyer, Donald E.
Author_Institution :
Texas Instruments Incorporated, P.O. Box 5012, MS 46, Dallas, Texas 75222; Endurex Corporation, P.O. Box 11154, Dallas, Texas 75223. (214) 238-2472
fYear :
1975
fDate :
27485
Firstpage :
48
Lastpage :
52
Keywords :
Atmosphere; Failure analysis; Instruments; Manufacturing; Mass spectroscopy; Microelectronics; Moisture; Packaging; Sampling methods; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1975. 13th Annual
Conference_Location :
Las Vegas, NV, USA
ISSN :
0735-0791
Type :
conf
DOI :
10.1109/IRPS.1975.362675
Filename :
4208056
Link To Document :
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