Title :
Improved Liquid Phase Chromatography Separation using Sub-micron Micromachining Technology
Author :
Tezcan, Deniz Sabuncuoglu ; Verbist, Agnes ; De Malsche, Wim ; Vangelooven, Joris ; Eghbali, Hamed ; Clicq, David ; Desmet, Gert ; De Moor, Piet
Author_Institution :
IMEC, Leuven
Abstract :
While liquid phase chromatography is using macroscopic columns filled with micron scale particles, a major separation enhancement is expected when using perfectly ordered (sub-) micron structures. Therefore an on-wafer chromatograph was fabricated using advanced micromachining technology. The first characterization results are presented and compared to the performance of state-of-the-art macroscopic devices.
Keywords :
chromatography; micromachining; separation; liquid phase chromatography separation; macroscopic columns; on-wafer chromatograph; perfectly ordered micron structures; state-of-the-art macroscopic devices; sub-micron micromachining technology; Chemical engineering; Chemical technology; Etching; Glass; Micromachining; Performance loss; Separation processes; Shape; Silicon; Wafer bonding;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4419079
