Title :
Process Control by Means of Accelerated Testing
Author :
Brodeur, Joseph E.
Author_Institution :
Fairchild Semiconductor, Mountain View, California
Abstract :
High temperature operating life test gives quick feedback on the processes used in fabrication of semiconductor wafers. The relatively high failure rate of the (so-called) freaks is quickly demonstrated in such a test and can indicate a marginal or out of control process. This method of process control concentrates on the initial fallout as a means of determining the reliability of final products. Greater than 150°C stress temperatures should not be applied to plastic encapsulated devices. Since most epoxies have glass transition temperatures in the range of 150°C to 180°C permanent damage to the package could result.
Keywords :
Fabrication; Feedback; Glass; Life estimation; Life testing; Plastics; Process control; Semiconductor device testing; Stress; Temperature;
Conference_Titel :
Reliability Physics Symposium, 1975. 13th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1975.362704