Title :
CMOS Devices - Advanced Device Structures
Author :
Chang, Chih-Sheng ; Hokazono, Akira
Author_Institution :
TSMC
Keywords :
Anisotropic magnetoresistance; Compressive stress; Electric variables; Etching; Germanium silicon alloys; Hydrogen; Insulation; MOSFET circuits; Nanoscale devices; Silicon germanium;
Conference_Titel :
Electron Devices Meeting, 2007. IEDM 2007. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4244-1507-6
Electronic_ISBN :
978-1-4244-1508-3
DOI :
10.1109/IEDM.2007.4419091