مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2605976

Title :

Auger Electron Spectroscopy

Author :

Morabito, J.M. ; Grunthaner, Frank

Author_Institution :

X-Ray Photoelectron Spectroscopy (ESCA), Chemical Diagnosis of Microelectronic Processing

fYear :

1976

fDate :

27851

Keywords :

Chemical processes; Electrons; Microelectronics; Spectroscopy;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Reliability Physics Symposium, 1976. 14th Annual

Conference_Location :

Las Vegas, NV, USA

ISSN :

0735-0791

Type :

conf

DOI :

10.1109/IRPS.1976.362712

Filename :

4208096

Link To Document :