Auger Electron Spectroscopy

Author

Morabito, J.M. ; Grunthaner, Frank

Author_Institution

X-Ray Photoelectron Spectroscopy (ESCA), Chemical Diagnosis of Microelectronic Processing

fYear

1976

fDate

27851

Keywords

Chemical processes; Electrons; Microelectronics; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1976. 14th Annual

Conference_Location

Las Vegas, NV, USA

ISSN

0735-0791

Type

DOI

10.1109/IRPS.1976.362712

Filename

4208096

Link To Document