DocumentCode
2606076
Title
Microsurgery as a Tool in the Analysis of L.S.I. Silicon Chips
Author
Loro, A.
Author_Institution
Bell-Northern Research, Box 3511, Station C, Ottawa, Ontario K1Y-4H7, Canada
fYear
1976
fDate
27851
Firstpage
33
Lastpage
37
Abstract
The ability to open or bridge selected conductors on an L.S.I. chip opens up a wide range of analytical opportunities in the field of failure analysis, design debugging, and commercial device analysis. Simple methods of severing, repairing and interconnecting conductors in high density L.S.I. silicon chips are described. The design details of a simple precision tool serving the dual functions of microsurgery and subsequent electrical probing of components is discussed. Results obtained with the methods described on various commercial & custom L.S.I. circuits are presented.
Keywords
Aluminum; Circuit testing; Conductors; Etching; Failure analysis; Integrated circuit interconnections; Microscopy; Microsurgery; Silicon; Surgery;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1976. 14th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1976.362718
Filename
4208102
Link To Document