DocumentCode
2606411
Title
Determining modulus of nanowires using nanoindentation technique
Author
Chang, Neng-Kai ; Lin, Yong-Siang ; Chen, Chi-Yao ; Chang, Shuo-Hung
Author_Institution
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei
fYear
2007
fDate
2-5 Aug. 2007
Firstpage
837
Lastpage
841
Abstract
This study demonstrates a finite element method for simulating the behavior of nanoindentation of copper nanowires and estimates their mechanical properties. The simulation results reveal that using well-known Oliver-Pharr theory, generally applied for materials with semi-infinite half-space, yields an underestimate of the elastic modulus of the wire materials. Moreover, the size of the indenter tip radius also influences the accuracy of the predicted elastic modulus. Such errors are mainly from the misestimate of contact area between an indenter and a specimen. They can be reduced directly from the observation of real contact area in the numerical modeling. The modified elastic modulus of the wires is very close to the bulk value.
Keywords
copper; elastic moduli; finite element analysis; indentation; nanowires; Cu; Oliver-Pharr theory; copper nanowires; elastic modulus; finite element method; mechanical properties; nanoindentation; numerical modeling; Atomic force microscopy; Atomic measurements; Erbium; Finite element methods; Force measurement; Mechanical factors; Nanostructured materials; Nanowires; Transistors; Wire; Nanoindentation; elastic modulus; finite element method; nanowire;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-0607-4
Electronic_ISBN
978-1-4244-0608-1
Type
conf
DOI
10.1109/NANO.2007.4601314
Filename
4601314
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