• DocumentCode
    2606411
  • Title

    Determining modulus of nanowires using nanoindentation technique

  • Author

    Chang, Neng-Kai ; Lin, Yong-Siang ; Chen, Chi-Yao ; Chang, Shuo-Hung

  • Author_Institution
    Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei
  • fYear
    2007
  • fDate
    2-5 Aug. 2007
  • Firstpage
    837
  • Lastpage
    841
  • Abstract
    This study demonstrates a finite element method for simulating the behavior of nanoindentation of copper nanowires and estimates their mechanical properties. The simulation results reveal that using well-known Oliver-Pharr theory, generally applied for materials with semi-infinite half-space, yields an underestimate of the elastic modulus of the wire materials. Moreover, the size of the indenter tip radius also influences the accuracy of the predicted elastic modulus. Such errors are mainly from the misestimate of contact area between an indenter and a specimen. They can be reduced directly from the observation of real contact area in the numerical modeling. The modified elastic modulus of the wires is very close to the bulk value.
  • Keywords
    copper; elastic moduli; finite element analysis; indentation; nanowires; Cu; Oliver-Pharr theory; copper nanowires; elastic modulus; finite element method; mechanical properties; nanoindentation; numerical modeling; Atomic force microscopy; Atomic measurements; Erbium; Finite element methods; Force measurement; Mechanical factors; Nanostructured materials; Nanowires; Transistors; Wire; Nanoindentation; elastic modulus; finite element method; nanowire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
  • Conference_Location
    Hong Kong
  • Print_ISBN
    978-1-4244-0607-4
  • Electronic_ISBN
    978-1-4244-0608-1
  • Type

    conf

  • DOI
    10.1109/NANO.2007.4601314
  • Filename
    4601314