DocumentCode

2606478

Title

Lumped Model For Single Silicon Beam Filters

Author

Hribeek, M. ; Newcomb, Robert W.

Author_Institution

University of Belgrade

fYear

1977

fDate

7-9 Nov 1977

Firstpage

448

Lastpage

450

Keywords

Circuits; Etching; Filters; Frequency; Partial differential equations; Resonance; Silicon; Springs; Transfer functions; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits, Systems and Computers, 1977. Conference Record. 1977 11th Asilomar Conference on

ISSN

1058-6393

Type

conf

DOI

10.1109/ACSSC.1977.748962

Filename

748962