Title :
Simulation of spectroscopic ellipsometry for dielectric lamellar gratings
Author :
Watanabe, K. ; Pistora, J. ; Foldyna, Martin ; Postava, K. ; Vlcek, Jaroslav
Author_Institution :
Department of Information and Communication Engineering, Fukuoka Institute of Technology, 3-30-1 Wajirohigashi, Higashi-h, Fukuoka 81 1-0295, Japan
Abstract :
Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li??s Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.
Keywords :
Dielectric losses; Dielectric materials; Diffraction; Electrochemical impedance spectroscopy; Electromagnetic measurements; Ellipsometry; Geometry; Gratings; Polarization; Wavelength measurement;
Conference_Titel :
Mathematical Methods in Electromagnetic Theory, 2004. 10th International Conference on
Conference_Location :
Dniepropetrovsk, Ukraine
Print_ISBN :
0-7803-8441-5
DOI :
10.1109/MMET.2004.1397097
