DocumentCode :
2606682
Title :
High Spatial Resolution Auger Electron Spectroscopy (AES) in a Diffusion-Pumped SEM
Author :
Brandis, E.K.
Author_Institution :
IBM System Products Division, East Fishkill, Hopewell Junction, N.Y. 12533
fYear :
1976
fDate :
27851
Firstpage :
296
Lastpage :
296
Abstract :
High spatial resolution Auger electron spectroscopy in an SEX is presented, and aspects of vacuum requirements for AES in a diffusion-pumped SEM are discussed. The vacuum system of a Cambridge Stereoscan* was rebuilt. Auger spectra recorded after 45 minutes of electron bombardment demonstrated that the carbon buildup-due to the polymerization of hydrocarbon molecules can be prevented by using the gas-jet technique. Auger data taken in an unmodified Cambridge Stereoscan, using only the gas-jet technique, is also presented. The spatial resolution of the SEM operating in the Auger mode is a function of necessary beam current, lens aberrations, and gun brightness. In the existing SEX equipped with a LaB6 electron gun, beam diameters of 0.4 ¿m containing 4 x 10¿7 A at 20 kV were obtained. This allowed the recording of greyscale Auger images with less than 0.5 ¿m spatial resolution in 400 sec.
Keywords :
Chemical processes; Cleaning; Electron beams; Hydrocarbons; Polymer films; Radio frequency; Silicon; Spatial resolution; Spectroscopy; Vacuum systems;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1976. 14th Annual
Conference_Location :
Las Vegas, NV, USA
ISSN :
0735-0791
Type :
conf
DOI :
10.1109/IRPS.1976.362757
Filename :
4208141
Link To Document :
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