Title :
The Use of High Energy Ion Beams for Surface and Thin Film Analysis
Author_Institution :
Bell Laboratories, Murray Hill, New Jersey 07974
Keywords :
Atomic measurements; Backscatter; Detectors; Energy resolution; Impurities; Ion beams; Light scattering; Solid state circuits; Transistors; X-ray scattering;
Conference_Titel :
Reliability Physics Symposium, 1976. 14th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1976.362758
