DocumentCode :
2606787
Title :
Leakage-Induced Hot Carrier Instability in Phosphorus-Doped SiO2 Gate IGFET Devices
Author :
Chaudhàri, P.K.
Author_Institution :
IBM Corporation, Poughkeepsie, N. Y. 12602. 914-463-5061
fYear :
1977
fDate :
28216
Firstpage :
5
Lastpage :
9
Abstract :
A reliability study has been performed on discrete n-channel IGFETs having phosphorus-doped SiO2 as a gate dielectric to characterize and determine the extent to which a new type of threshold voltage instability due to the leakage-induced hot carrier injection from the silicon substrate into SiO2 is present. A first-order trapping kinetics model with linearly varying trap centers in oxide layer is used to analyze time and temperature data of this shift. The model predicts that the shift ¿V obeys (¿V)1/2 lnt law. From the value of the activation energy that was determined, it was found that the diffusion leakage current dominates the induced threshold voltage shift. The capture cross section of the trapping centers is estimated as 2.46 × 10¿13 cm2.
Keywords :
Dielectric substrates; Hot carrier injection; Hot carriers; Kinetic theory; Leakage current; Predictive models; Silicon; Substrate hot electron injection; Temperature; Threshold voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1977. 15th Annual
Conference_Location :
LAs Vegas, NV, USA
ISSN :
0735-0791
Type :
conf
DOI :
10.1109/IRPS.1977.362764
Filename :
4208151
Link To Document :
بازگشت