DocumentCode :
2606939
Title :
EBIC - A Valuable Tool for Semiconductor Evaluation and Failure Analysis
Author :
Beall, James R. ; Hamiter, Leon, Jr.
Author_Institution :
Martin Marietta Corporation, Denver, Colorado 80201. (303)979-7000
fYear :
1977
fDate :
28216
Firstpage :
61
Lastpage :
69
Keywords :
Acceleration; Current measurement; Electron beams; Energy dissipation; Failure analysis; Integrated circuit measurements; Position measurement; Radiative recombination; Solids; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1977. 15th Annual
Conference_Location :
LAs Vegas, NV, USA
ISSN :
0735-0791
Type :
conf
DOI :
10.1109/IRPS.1977.362773
Filename :
4208160
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2606939
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