Probe technologies for micro/nano measurements

Conventional probes for dimensional measurement of parts in macro scale are no more capable for the meso- to micro-sized parts that require accuracy to the degree of 100 nm to 10 nm. This paper will discuss the needs of probe technologies for micro/nano measurements. Both of the non-contact and contact types of probes will be addressed. For the non-contact probe, the principles and applications of focus probe and confocal microscope are introduced. Developed systems show the focus probe can reach to the accuracy of 1 nm and the confocal microscope has 0.1mum accuracy. For the contact type, the fabrication of micro probe tip and a newly developed 3D touch probe are described. Experiment shows the minimum contact force can be as small as 50 muN.