• DocumentCode
    2607287
  • Title

    Laterally grown SnO2 nanowires and their NO2 gas sensing characteristics

  • Author

    Park, Jae-Hwan ; Lim, Dong-Gun ; Choi, Young-Jin ; Kim, Dong-Wan ; Choi, Kyoung-Jin ; Park, Jae-Gwan

  • Author_Institution
    Dept. of Electron. Eng., Chungju Nat. Univ., Chungju
  • fYear
    2007
  • fDate
    2-5 Aug. 2007
  • Firstpage
    1054
  • Lastpage
    1057
  • Abstract
    One dimensional semiconducting nanomaterials have attracted considerable interest for their potential as the building blocks for fabricating various nanodevices. In this paper, a simple and efficient way of preparing highly sensitive SnO2 nanowire-based gas sensor without an arduous lithography process was studied. The SnO2 nanowires could be grown laterally upon the Si substrate by separating the Au catalyst layer in the substrate. As the electric current is transported along the networks of the nanowires, not along the bottom layer on the substrate, the sensitivity to gases was maximized in this lateral-type structures.
  • Keywords
    electric sensing devices; gas sensors; nanowires; nitrogen compounds; semiconductor materials; tin compounds; Au catalyst layer; NO2; NO2 gas sensing; Si substrate; SnO2; nanowire-based gas sensor; Electrodes; Gas detectors; Gold; Nanomaterials; Nanowires; Scanning electron microscopy; Semiconductivity; Semiconductor materials; Substrates; Tin; Gas sensor; Nanodevice; Nanowire; SnO2;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
  • Conference_Location
    Hong Kong
  • Print_ISBN
    978-1-4244-0607-4
  • Electronic_ISBN
    978-1-4244-0608-1
  • Type

    conf

  • DOI
    10.1109/NANO.2007.4601364
  • Filename
    4601364