Title :
Laterally grown SnO2 nanowires and their NO2 gas sensing characteristics
Author :
Park, Jae-Hwan ; Lim, Dong-Gun ; Choi, Young-Jin ; Kim, Dong-Wan ; Choi, Kyoung-Jin ; Park, Jae-Gwan
Author_Institution :
Dept. of Electron. Eng., Chungju Nat. Univ., Chungju
Abstract :
One dimensional semiconducting nanomaterials have attracted considerable interest for their potential as the building blocks for fabricating various nanodevices. In this paper, a simple and efficient way of preparing highly sensitive SnO2 nanowire-based gas sensor without an arduous lithography process was studied. The SnO2 nanowires could be grown laterally upon the Si substrate by separating the Au catalyst layer in the substrate. As the electric current is transported along the networks of the nanowires, not along the bottom layer on the substrate, the sensitivity to gases was maximized in this lateral-type structures.
Keywords :
electric sensing devices; gas sensors; nanowires; nitrogen compounds; semiconductor materials; tin compounds; Au catalyst layer; NO2; NO2 gas sensing; Si substrate; SnO2; nanowire-based gas sensor; Electrodes; Gas detectors; Gold; Nanomaterials; Nanowires; Scanning electron microscopy; Semiconductivity; Semiconductor materials; Substrates; Tin; Gas sensor; Nanodevice; Nanowire; SnO2;
Conference_Titel :
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-0607-4
Electronic_ISBN :
978-1-4244-0608-1
DOI :
10.1109/NANO.2007.4601364