Title :
Development of silicon microelectrodes for cochlear implant technology
Author :
Parker, Joanna R. ; Harrison, H.Barry ; Clark, Graeme M. ; Patrick, Jim ; Reinhold, Olaf
Author_Institution :
Cooperative Res. Centre for Cochlear Implant Speech & Hearing Res., Qld., Australia
Abstract :
Silicon fabrication technology is being explored as a possible solution to the manufacturing of advanced cochlear implant electrode arrays. Silicon probes have been produced with thickness of 5 μm and coated in Parylene(R) polymer to provide strength. To enable handling they are given a backing of silicone rubber before surgical use. This paper presents some techniques used to produce such silicon microelectrodes
Keywords :
hearing aids; microelectrodes; silicon; Parylene polymer coating; Si; cochlear implant electrode array; fabrication technology; silicon microelectrode; silicone rubber backing; surgical device; Cochlear implants; Electrodes; Fabrication; Manufacturing; Microelectrodes; Polymer films; Probes; Rubber; Silicon; Surgery;
Conference_Titel :
Optoelectronic and Microelectronic Materials And Devices Proceedings, 1996 Conference on
Conference_Location :
Canberra, ACT
Print_ISBN :
0-7803-3374-8
DOI :
10.1109/COMMAD.1996.610046
