Title :
Analytical Techniques for Electronic Materials - A Comparative Evaluation
Author_Institution :
Westinghouse Research and Development Center, Pittsburgh, PA 15235
Abstract :
A short review of beam analytical techniques is presented. The review is aimed at applications involving analysis and problem-solving in electronic devices. The goal is to stress the advantages and weak spots of each method, so that a material´s engineer could make an optimal selection of a particular analytical method.
Keywords :
Cathode ray tubes; Coils; Dispersion; Electron beams; Lenses; Mass spectroscopy; Scanning electron microscopy; Surface contamination; Surface morphology; Surface topography;
Conference_Titel :
Reliability Physics Symposium, 1978. 16th Annual
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/IRPS.1978.362831
