DocumentCode
2607815
Title
Analytical Techniques for Electronic Materials - A Comparative Evaluation
Author
Kossowsky, R.
Author_Institution
Westinghouse Research and Development Center, Pittsburgh, PA 15235
fYear
1978
fDate
28581
Firstpage
112
Lastpage
120
Abstract
A short review of beam analytical techniques is presented. The review is aimed at applications involving analysis and problem-solving in electronic devices. The goal is to stress the advantages and weak spots of each method, so that a material´s engineer could make an optimal selection of a particular analytical method.
Keywords
Cathode ray tubes; Coils; Dispersion; Electron beams; Lenses; Mass spectroscopy; Scanning electron microscopy; Surface contamination; Surface morphology; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1978. 16th Annual
Conference_Location
San Diego, CA, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1978.362831
Filename
4208221
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