Title :
Precise analogue characterization of MIM capacitors using an improved charge-based capacitance measurement (CBCM) technique
Author :
Ning, Zhenqiu ; Delecourt, Henri-Xavier ; De Schepper, Luc ; Gillon, Renaud ; Tack, Marnix
Author_Institution :
AMI Semicond. Belgium, Oudenaarde, Belgium
Abstract :
The MIM capacitor is a key building block for mixed signal design. To perform an accurate analogue characterization of the MIM capacitor, a precise technique based on an improved CBCM is proposed. A test structure containing the pass-gate implementation of the CBCM structures and the leakage current suppression circuits has been designed, fabricated and tested in AMIS 0.35 mm process. The technique has been proven to be accurate, robust and easy to use for the analogue characterization of the MIM capacitors.
Keywords :
MIM devices; capacitors; leakage currents; semiconductor device measurement; semiconductor device models; semiconductor device testing; 0.35 mm; MIM capacitors; analogue characterization; charge-based capacitance measurement; leakage current suppression; mixed signal design; pass-gate implementation; Ambient intelligence; Capacitance measurement; Circuit testing; Dielectric measurements; Inverters; Linearity; MIM capacitors; Parasitic capacitance; Signal design; Voltage;
Conference_Titel :
Solid-State Device Research Conference, 2005. ESSDERC 2005. Proceedings of 35th European
Print_ISBN :
0-7803-9203-5
DOI :
10.1109/ESSDER.2005.1546637
