Title :
Evaluation of mechanical properties of polycrystalline al thin films on 7059 glass substrates
Author :
Zhou, Xiang Y. ; Jiang, Zhuang D. ; Wang, Hai R. ; Yu, Rui X.
Author_Institution :
Inst. of Precision Eng., Xi´´an Jiaotong Univ., Xian
Abstract :
To determine the hardness and elastic modulus of a 560 nm polycrystalline Al thin film deposited on 7059 glass substrate from nanoindentation tests, we design a method to avoid the severe influences of both substrate and pile-up behavior on evaluated results. Firstly, the hardness is calculated by measuring the total projected contact area of residual impression with help of atomic force microscope (AFM). Then, since the Al film and its substrate have very similar elastic properties, the true elastic modulus of thin film is determined from the known hardness by the constant modulus assumption analysis. The results show that compared with the Oliver-Pharr method the present method can obtain more reliable results.
Keywords :
aluminium; atomic force microscopy; elastic moduli; hardness; indentation; metallic thin films; 7059 glass substrates; AFM; Al; Oliver-Pharr method; atomic force microscope; elastic modulus; hardness; mechanical properties; nanoindentation tests; polycrystalline aluminium thin films; size 560 nm; total projected contact area; Atomic force microscopy; Atomic measurements; Design methodology; Force measurement; Glass; Mechanical factors; Sputtering; Substrates; Testing; Transistors; Aluminum thin films; Elastic modulus; Hardness; Nanoindentation; Pile-up;
Conference_Titel :
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4244-0607-4
Electronic_ISBN :
978-1-4244-0608-1
DOI :
10.1109/NANO.2007.4601412
