Title :
Absolute Sphericity Measurement: a Comparative Study on the Use of Interferometry and a Shack-Hartmann Sensor
Author :
Pfund, J. ; Lindlein, N. ; Schwider, J. ; Burow, R. ; Blumel, T. ; Elssner, K.-E.
Author_Institution :
Universitat Erlangen-Nurnberg
Keywords :
Adaptive optics; Aluminum; Calibration; Chemical analysis; Optical interferometry; Optical sensors; Optical surface waves; Spectroscopy; Testing; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
DOI :
10.1109/CLEOE.1998.1115498