Title :
Characteristics of a Surface Conductivity Moisture Monitor for Hermetic Integrated Circuit Packages
Author :
Lowry, R.K. ; Miller, L.A. ; Jonas, A.W. ; Bird, J.M.
Author_Institution :
Harris Semiconductor, Box 883, Melbourne, FL 32901
Abstract :
An in-situ surface conductivity sensor for measuring water content of hermetic package ambients is described. Results of correlation experiments with mass spectroscopy and volume-effect sensors are presented. Sensor studies of water desorption and contamination by leached ions are discussed. The surface conductivity sensor is well-suited to defining moisture levels within all types of hermetic packages.
Keywords :
Conductivity measurement; Integrated circuit measurements; Integrated circuit packaging; Mass spectroscopy; Moisture; Monitoring; Pollution measurement; Sensor phenomena and characterization; Surface contamination; Water pollution;
Conference_Titel :
Reliability Physics Symposium, 1979. 17th Annual
Conference_Location :
San Diego, CA, USA
DOI :
10.1109/IRPS.1979.362877
