• DocumentCode
    2609132
  • Title

    Instability and Failure Mechanisms of Small Area, Nitride-Defined Schottky Barrier Diodes, in LSI Applications

  • Author

    Kim, S.U.

  • Author_Institution
    IBM General Technology Division, Essex Junction, Vermont 05452
  • fYear
    1979
  • fDate
    28946
  • Firstpage
    226
  • Lastpage
    233
  • Keywords
    Equations; Etching; Failure analysis; Integrated circuit technology; Large scale integration; Leakage current; Schottky barriers; Schottky diodes; Silicon; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1979. 17th Annual
  • Conference_Location
    San Diego, CA, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1979.362898
  • Filename
    4208291