Title :
Voltage Contrast SEM Observations with Microprocessor Controlled Device Timing
Author :
Bindell, J.B. ; McGinn, J.N.
Author_Institution :
Bell Telephone Laboratories, Incorporated, 555 Union Boulevard, Allentown, Pennsylvania 18103
Abstract :
A voltage contrast technique which generates a video display of data movement within an active integrated circuit has been developed. The technique utilizes a microprocessor to exercise and control the flow of data within an integrated circuit so that SEM images of sequential logic states can be generated without the use of electron beam blanking.
Keywords :
Blanking; Circuits; Clocks; Liquid crystal displays; Logic devices; Microprocessors; Scanning electron microscopy; Shift registers; Timing; Voltage control;
Conference_Titel :
Reliability Physics Symposium, 1980. 18th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1980.362912
