Title :
SEM Techniques for the Analysis of Memory Circuits
Author :
Beall, J.R. ; Wilson, D.D. ; Echols, W.E. ; Walter, N. J J
Author_Institution :
MARTIN MAIETTA CORPORATION, P. O. BOX 179, DENVER, COLORADO 80201, (3C3) 977-3838
Keywords :
Circuit analysis; Circuit testing; Electron beams; Etching; Glass; Logic circuits; Logic testing; Scanning electron microscopy; Silicon; Voltage;
Conference_Titel :
Reliability Physics Symposium, 1980. 18th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1980.362914
