DocumentCode
2609646
Title
Liquid Crystal Technique as a Failure Analysis Tool
Author
Goel, Ajit ; Gray, Andy
Author_Institution
American Microsystems Inc., 3800 Homestead Road, Santa Clara, California 95051, (408) 246-0330
fYear
1980
fDate
29312
Firstpage
115
Lastpage
115
Abstract
This paper describes a method for identifying location of hot spots/shorts on MOS integrated circuits using liquid crystal technique. Several articles have been published discussing the theory and principles of this technique. This paper will concentrate on the practical aspects of the method.
Keywords
Chemicals; Electron optics; Failure analysis; Fires; Liquid crystals; Optical films; Optical microscopy; Power supplies; Scanning electron microscopy; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1980. 18th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1980.362925
Filename
4208321
Link To Document