Title :
Liquid Crystal Technique as a Failure Analysis Tool
Author :
Goel, Ajit ; Gray, Andy
Author_Institution :
American Microsystems Inc., 3800 Homestead Road, Santa Clara, California 95051, (408) 246-0330
Abstract :
This paper describes a method for identifying location of hot spots/shorts on MOS integrated circuits using liquid crystal technique. Several articles have been published discussing the theory and principles of this technique. This paper will concentrate on the practical aspects of the method.
Keywords :
Chemicals; Electron optics; Failure analysis; Fires; Liquid crystals; Optical films; Optical microscopy; Power supplies; Scanning electron microscopy; Temperature;
Conference_Titel :
Reliability Physics Symposium, 1980. 18th Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1980.362925
