• DocumentCode
    2609840
  • Title

    Analysis of Organic Surface Contaminants by Plasma Chromatography - Mass Spectroscopy and Raman Microprobe Techniques

  • Author

    Carr, T.W.

  • Author_Institution
    IBM Data Systems Division, East Fishkill, Hopewell Junction, N.Y. 12533
  • fYear
    1980
  • fDate
    29312
  • Firstpage
    186
  • Lastpage
    189
  • Abstract
    A major problem in the analysis of surface contaminants is the identification and characterization of organics, especially of small areas. The frequently-used surface analytical techniques provide elemental information which is insufficient for organic analysis. Plasma chromotography-mass spectroscopy and the laser Raman microprobe technique are useful in characterizing organic surface contaminants. Both techniques are described and examples of application of the techniques are given.
  • Keywords
    Chemical analysis; Electrons; Information analysis; Mass spectroscopy; Optical scattering; Optical surface waves; Plasmas; Raman scattering; Surface contamination; Surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1980. 18th Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1980.362937
  • Filename
    4208333