DocumentCode
2609840
Title
Analysis of Organic Surface Contaminants by Plasma Chromatography - Mass Spectroscopy and Raman Microprobe Techniques
Author
Carr, T.W.
Author_Institution
IBM Data Systems Division, East Fishkill, Hopewell Junction, N.Y. 12533
fYear
1980
fDate
29312
Firstpage
186
Lastpage
189
Abstract
A major problem in the analysis of surface contaminants is the identification and characterization of organics, especially of small areas. The frequently-used surface analytical techniques provide elemental information which is insufficient for organic analysis. Plasma chromotography-mass spectroscopy and the laser Raman microprobe technique are useful in characterizing organic surface contaminants. Both techniques are described and examples of application of the techniques are given.
Keywords
Chemical analysis; Electrons; Information analysis; Mass spectroscopy; Optical scattering; Optical surface waves; Plasmas; Raman scattering; Surface contamination; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1980. 18th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1980.362937
Filename
4208333
Link To Document