Title :
Stochastic modeling of the pull-in voltage in a MEMS beam structure
Author :
Bölöni, F. ; Benabou, A. ; Tounzi, A.
Author_Institution :
L2EP, Univ. Lille 1, Villeneuve-d´´Ascq, France
Abstract :
This work presents a stochastic approach to model the pull-in voltage in a MEMS (Micro Electro Mechanical Systems) beam structure, using Monte Carlo (MC) simulations. The pull-in model is a coupled FEM (Finite Element Method) electrostatic and analytical mechanical model. The shape and material properties of the MEMS constitute the random variables for the MC simulations. The results allow finding the influence of each input parameter and the distribution of the pull-in voltage.
Keywords :
Monte Carlo methods; beams (structures); finite element analysis; micromechanical devices; stochastic processes; FEM electrostatic model; MEMS beam structure; Monte Carlo simulation; finite element method; micro electro mechanical system; pull-in voltage; stochastic modeling; Analytical models; Coupled mode analysis; Electrostatic analysis; Finite element methods; Mechanical systems; Micromechanical devices; Monte Carlo methods; Stochastic processes; Stochastic systems; Voltage;
Conference_Titel :
Electromagnetic Field Computation (CEFC), 2010 14th Biennial IEEE Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-7059-4
DOI :
10.1109/CEFC.2010.5481463
