DocumentCode :
2610250
Title :
Electro-epitaxial growth of thin film silicon
Author :
Cunningham, Douglas W. ; Mauk, Michael ; Curran, James ; Barnett, Allen
Author_Institution :
AstroPower Inc., Newark, DE, USA
fYear :
1990
fDate :
21-25 May 1990
Firstpage :
307
Abstract :
Epitaxial growth of silicon from a liquid-metal solution with growth driven by the passage of current through the solvent has been achieved. The actions of the current is not to produce a faradaic electrochemical reaction but to enhance mass transport to the seed for the solvated silicon atoms. Planar devices have been grown using a temperature step with electric current and using electric current alone. A 15 μm thick film was grown using 20 A cm2 for 30 min with no step. Overgrowth on silicon dioxide produced continuous films close to 1 cm2. Characterization of the electroepitaxy solar cells have shown open-circuit voltages of 529 mV and short-circuit current densities of 14 mA cm2 with no antireflection coating
Keywords :
elemental semiconductors; liquid phase epitaxial growth; semiconductor thin films; silicon; solar cells; 15 micron; 529 mV; electro-epitaxial growth; liquid-metal solution; mass transport; open-circuit voltages; semiconductor; short-circuit current densities; solar cells; solvated silicon atoms; temperature step; thin film Si; Atomic layer deposition; Atomic measurements; Current; Epitaxial growth; Semiconductor films; Semiconductor thin films; Silicon compounds; Solvents; Temperature; Thick films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photovoltaic Specialists Conference, 1990., Conference Record of the Twenty First IEEE
Conference_Location :
Kissimmee, FL
Type :
conf
DOI :
10.1109/PVSC.1990.111637
Filename :
111637
Link To Document :
بازگشت