Reliability lifetest on etch-stop 0.5-μm PHEMT with reduced gate pitch and ohmic width geometry

Author

Saigusa, Haru ; Malik, Anju ; Rushing, Lance ; Gao, Frank

fYear

2003

fDate

2003

Firstpage

Lastpage

Keywords

Etching; FETs; Geometry; PHEMTs; Semiconductor device reliability; Stress; Switches; Temperature; Testing; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

GaAs Reliability Workshop, 2003. Proceedings

Print_ISBN

0-7908-0104-3

Type

DOI

10.1109/GAASRW.2003.183765

Filename

1397316

Link To Document