Title :
Detailed physical simulation of program disturb mechanisms in Sub-50 nm NAND flash memory strings
Author :
Nguyen, C.D. ; Kuligk, A. ; Vexler, M.I. ; Klawitter, M. ; Beyer, V. ; Melde, T. ; Czernohorsky, M. ; Meinerzhagen, B.
Author_Institution :
BST, Tech. Univ. Braunschweig, Braunschweig, Germany
Abstract :
The hot electron induced mechanism disturbing the stored information in inhibited bit lines during the programming of nonvolatile memories with NAND architecture is studied in detail using a new dedicated advanced physical simulation scheme for the first time.
Keywords :
NAND circuits; flash memories; hot carriers; random-access storage; semiconductor process modelling; NAND flash memory strings; hot electron induced mechanism; nonvolatile memories; physical simulation; program disturb mechanism; Doping; Electric potential; Logic gates; Programming; Semiconductor process modeling; Silicon; Substrates;
Conference_Titel :
Simulation of Semiconductor Processes and Devices (SISPAD), 2010 International Conference on
Conference_Location :
Bologna
Print_ISBN :
978-1-4244-7701-2
Electronic_ISBN :
1946-1569
DOI :
10.1109/SISPAD.2010.5604512