Title :
Water Vapor Measurements in Small Volumes using Atmospheric Pressure Chemical Ionization - Mass Spectrometry
Author :
Stimac, Robert M. ; Cohen, Martin J. ; Wernlund, Roger F.
Author_Institution :
PCP, inc., 2155 Indian Road, West Palm Beach, Florida 33409, 305/683-0507
Abstract :
Atmospheric pressure chemical ionization-mass spectrometry (API-MS) was used to study the characteristics and thermodynamics of positive water cluster ions, providing a basis for measuring the water vapor content of sealed integrated circuit packages. Measurements of selected water cluster ions enabled the quantitation of water vapor in the low ppm range in steady state gas flows or in injection volumes equivalent to 50 microliters at concentrations well below 200 ppm.
Keywords :
Atmospheric measurements; Chemicals; Integrated circuit measurements; Integrated circuit packaging; Ionization; Mass spectroscopy; Pressure measurement; Thermodynamics; Volume measurement; Water;
Conference_Titel :
Reliability Physics Symposium, 1982. 20th Annual
Conference_Location :
San Diego, NV, USa
DOI :
10.1109/IRPS.1982.361939
