DocumentCode :
2611798
Title :
Performance evaluation of a miniaturized unconstrained digital on-off switching valve
Author :
Jien, Sumadi ; Ogawa, Yoichiro ; Hirai, Shinichi ; Honda, Kenshin
Author_Institution :
Dept. of Robot., Ritsumeikan Univ., Kusatsu
fYear :
2008
fDate :
2-5 July 2008
Firstpage :
659
Lastpage :
664
Abstract :
The technology of pneumatic valves is progressing from large-scale and heavyweight industrial valves to the development of miniaturized valves with less weight. The size and weight of valves are no longer problems due to the development of microelectromechanical system (MEMS) fabrication processes. The limitations of micro valves are their low flow rate and manufacturing complexity. In this paper, we discuss an unusual method of miniaturization using piezoelectric actuated unconstrained valves with comparatively higher flow rate and a simple construction process. Integration of a piezoelectric actuator driver and a microcontroller into the valve unit was accomplished, which allowed reduction of the overall size. Moreover, microcomputer-embedded valves have a digital nature, which enables direct pulse width modulation (PWM) control from the valve. The characteristics of the valve, design parameters, flow tendency and valve response time are discussed. Experimental results of pulse width and pulse frequency modulation are evaluated. The behavior and versatility of unconstrained modulated digital switching valve in control systems are presented in detail, with descriptions of the advantages and disadvantages of unconstrained valve.
Keywords :
microcontrollers; microvalves; piezoelectric actuators; pneumatic actuators; pulse frequency modulation; pulse width modulation; MEMS fabrication processes; microcomputer-embedded valves; microcontroller; microelectromechanical system; microvalves; miniaturized unconstrained digital on-off switching valve; modulated digital switching valve; piezoelectric actuated unconstrained valves; piezoelectric actuator driver; pneumatic valves; pulse frequency modulation; pulse width modulation control; Digital modulation; Fabrication; Large-scale systems; Manufacturing industries; Microelectromechanical systems; Micromechanical devices; Microvalves; Pulse width modulation; Space vector pulse width modulation; Valves; PWM control valve; digital valve; microcontroller; miniaturization; unconstrained;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics, 2008. AIM 2008. IEEE/ASME International Conference on
Conference_Location :
Xian
Print_ISBN :
978-1-4244-2494-8
Electronic_ISBN :
978-1-4244-2495-5
Type :
conf
DOI :
10.1109/AIM.2008.4601738
Filename :
4601738
Link To Document :
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