Title :
Nomarski contrast microscopy of CuBSe2/Mo (B=In, Ga) films
Author :
Margulis, L. ; Jakubowicz, A. ; Hodes, G. ; Cahen, David
Author_Institution :
Center for Energy Res., Weizmann Inst. of Sci., Rehovot, Israel
Abstract :
During a study of grain boundaries and interfaces in Mo/CuB Se2 (CBS, B=In, Ga) polycrystalline films, multigrain aggregates were discovered in these structures if the substrate is 7059 Corning glass or Si. These aggregates were revealed by planar electron-beam-induced current (EBIC) on the CBS surface, by normal optical microscopy on the plasma-etched CBS surface, and by optical Nomarski interference contrast (NIC) microscopy when viewed through the glass substrate. This last method is applicable also to complete solar cell structures. In that case, when the Mo film is sufficiently thin, observation through the glass substrate shows the areas onto which the CdS window layer and the metal pads are deposited on CBS films. The aggregates, which are 10-100 μm in size, probably result from differences in the thermal expansion coefficients of the components of the multilayer structure. NIC microscopy seems to be a rapid, simple and nondestructive method to assess certain aspects of film quality
Keywords :
EBIC; copper compounds; electron microscope examination of materials; elemental semiconductors; grain boundaries; indium compounds; interface structure; molybdenum; semiconductor-metal boundaries; solar cells; ternary semiconductors; 10 to 100 micron; CdS; CuGaSe2-Mo; CuInSe2-Mo; EBIC; Nomarski contrast microscopy; film quality; grain boundaries; interfaces; metal pads; multigrain aggregates; optical microscopy; planar electron-beam-induced current; polycrystalline; solar cell; substrate; thermal expansion coefficients; window layer; Aggregates; Electron microscopy; Glass; Grain boundaries; Interference; Optical films; Optical microscopy; Plasmas; Semiconductor films; Substrates;
Conference_Titel :
Photovoltaic Specialists Conference, 1990., Conference Record of the Twenty First IEEE
Conference_Location :
Kissimmee, FL
DOI :
10.1109/PVSC.1990.111721
