DocumentCode
2612071
Title
Aluminum Conductor Line Corrosion
Author
Bhide, Vishwas ; Eldridge, J.M.
Author_Institution
American Microsystems, Inc., 3800 Homestead Road, Santa Clara, CA 95051
fYear
1983
fDate
30407
Firstpage
44
Lastpage
51
Abstract
Effects of P2O5 concentration on the surface conductivity of Phospho Silicate Glass (PSG) films and the attendant corrosion of Al conductor lines on the PSG was investigated using various Temperature-Humidity-Bias conditions. These results will be presented, along with those obtained using various techniques to increase the passivity of the metal, PSG surface modification and conformal die coating.
Keywords
Aluminum; Coatings; Conductivity; Conductors; Corrosion; Fingers; Metallization; Passivation; Plastics; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1983. 21st Annual
Conference_Location
Phoenix, AZ, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1983.361960
Filename
4208481
Link To Document