• DocumentCode
    2612921
  • Title

    The Physics and Reliability of Fusing Polysilicon

  • Author

    Ito, A. ; George, E. W Pete ; Lowry, R.K. ; Swasey, H.A.

  • Author_Institution
    Harris Semiconductor, Digital Products Division, P. O. Box 883, MS 54-125, Melbourne, Florida 32901. (305) 724-7000
  • fYear
    1984
  • fDate
    30773
  • Firstpage
    17
  • Lastpage
    29
  • Abstract
    This paper is presented to further the understanding of the physics of programming polysilicon fuses. One and two dimensional models have been developed to understand the fusing event and predict the fusing time and power relationship. The predicted fusibility (fusing time and power dependence) is shown to be in good agreement with the experimental data.
  • Keywords
    Conductivity; Current density; Fuses; Grain boundaries; Grain size; Physics; Schottky barriers; Temperature; Thermionic emission; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1984. 22nd Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1984.362015
  • Filename
    4208539
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2612921