Title : 
Pulsed Infra-Red Microscopy for Debugging Latch-Up on CMOS Products
         
        
        
            Author_Institution : 
Intel Corp. Santa Clara, CA
         
        
        
        
        
        
            Abstract : 
A Near Infra Red Microscope has been used to debug latch-up problems on CMOS products. The microscope is used to image the recombination radiaton emitted by the forward biased junctions in SCR latch-up. If latchup occurrs at one location it will spread like a cancer untill several sites have latched up. This causes the traditional heat sensing techniques to give incorrect results. Techniques were developed to view and understand the mechanisms which cause latch-up spreading. Various kinds of I/O latch-up modes have been studied and described.
         
        
            Keywords : 
CMOS technology; Debugging; Instruments; Liquid crystals; Microscopy; Silicon devices; Spontaneous emission; Thyristors; Variable structure systems; Very large scale integration;
         
        
        
        
            Conference_Titel : 
Reliability Physics Symposium, 1984. 22nd Annual
         
        
            Conference_Location : 
Las Vegas, NV, USA
         
        
        
        
            DOI : 
10.1109/IRPS.1984.362029