DocumentCode
2613161
Title
Lifetime of Bonded Contacts on Thin Film Metallizations
Author
Hieber, Hartmann ; Pape, Karin
Author_Institution
PHILIPS GmbH, Forschungslaboratorium Hamburg, Vogt-Kölln-Str. 30, D-2000 Hamburg 54, Germany
fYear
1984
fDate
30773
Firstpage
128
Lastpage
133
Abstract
Gold beams and wires are microwelded to a stable gold/platinum/titanium thin-film sandwich on silicon wafers. The contacts are subjected to simultaneous thermal and mechanical loads. The measured times-to-fracture are analyzed by mechanisms of creep-crack propagation. A creep rupture equation contains the stress exponent and the thermal activation energy of plastic f low as the material-specific parameters. The time-to-fracture is strongly affected by the texture of the beams and wires and by the geometry of the welded contact. The equation can be used for extrapolation in a temperature interval between 300 and 650K.
Keywords
Equations; Gold; Metallization; Plastic films; Platinum; Thermal stresses; Titanium; Transistors; Wafer bonding; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1984. 22nd Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1984.362030
Filename
4208554
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