Title :
Lifetime of Bonded Contacts on Thin Film Metallizations
Author :
Hieber, Hartmann ; Pape, Karin
Author_Institution :
PHILIPS GmbH, Forschungslaboratorium Hamburg, Vogt-Kölln-Str. 30, D-2000 Hamburg 54, Germany
Abstract :
Gold beams and wires are microwelded to a stable gold/platinum/titanium thin-film sandwich on silicon wafers. The contacts are subjected to simultaneous thermal and mechanical loads. The measured times-to-fracture are analyzed by mechanisms of creep-crack propagation. A creep rupture equation contains the stress exponent and the thermal activation energy of plastic f low as the material-specific parameters. The time-to-fracture is strongly affected by the texture of the beams and wires and by the geometry of the welded contact. The equation can be used for extrapolation in a temperature interval between 300 and 650K.
Keywords :
Equations; Gold; Metallization; Plastic films; Platinum; Thermal stresses; Titanium; Transistors; Wafer bonding; Wires;
Conference_Titel :
Reliability Physics Symposium, 1984. 22nd Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1984.362030