• DocumentCode
    2613161
  • Title

    Lifetime of Bonded Contacts on Thin Film Metallizations

  • Author

    Hieber, Hartmann ; Pape, Karin

  • Author_Institution
    PHILIPS GmbH, Forschungslaboratorium Hamburg, Vogt-Kölln-Str. 30, D-2000 Hamburg 54, Germany
  • fYear
    1984
  • fDate
    30773
  • Firstpage
    128
  • Lastpage
    133
  • Abstract
    Gold beams and wires are microwelded to a stable gold/platinum/titanium thin-film sandwich on silicon wafers. The contacts are subjected to simultaneous thermal and mechanical loads. The measured times-to-fracture are analyzed by mechanisms of creep-crack propagation. A creep rupture equation contains the stress exponent and the thermal activation energy of plastic f low as the material-specific parameters. The time-to-fracture is strongly affected by the texture of the beams and wires and by the geometry of the welded contact. The equation can be used for extrapolation in a temperature interval between 300 and 650K.
  • Keywords
    Equations; Gold; Metallization; Plastic films; Platinum; Thermal stresses; Titanium; Transistors; Wafer bonding; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1984. 22nd Annual
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    0735-0791
  • Type

    conf

  • DOI
    10.1109/IRPS.1984.362030
  • Filename
    4208554