Approach of a MEMS gyroscope sensing element simulate and design

This paper reports a MEMS gyroscope that is driven by the rotating carrier´s angular velocity. The structure and fabrication are introduced in the paper. The silicon processing and simulating of the sensing element are studied. We use coventor ware to simulate structure. In simulation, the first modal frequency we obtained is 200.49Hz, and the normal static capacitance is 18.7pf from electrode to sensing element. We compare the capacitance value under different space interval, consider the space interval change is the mainly reason of capacitance inconsistency.