Title :
Study of MEMS-based high-resistance silicon K-band planar array microstrip antenna
Author :
Guo, Yidong ; Liu, Xiaoming ; Zhu, Zhonggan
Author_Institution :
Sch. of Mechatron. Eng., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
In order to manufacture antenna integrated with RF-MEMS switch on the same substrate, a silicon wafer was used as substrate. As the high dielectric constant of silicon (ϵr=11.9) degrades an antenna efficiency and excites surface waves especially at high frequency, removing substrate under the antenna and giving birth to an air cavity is a general way to reduce the dielectric constant of silicon. In this paper, a planar array antenna of 2 elements is designed according to the research of K band antenna of air communication equipments based on MEMS technology, and its performance meets the demands, which provides an effective method for designing and manufacturing of Ku band and X band antenna. The microstrip array antenna is designed with the element and simulated in HFSS. The simulation result matches well with the demand.
Keywords :
antenna accessories; elemental semiconductors; microstrip antenna arrays; microswitches; microwave antenna arrays; permittivity; planar antenna arrays; silicon; Ku band antenna; MEMS-based high-resistance silicon K-band planar array microstrip antenna; RF-MEMS switch; X band antenna; air cavity; air communication equipment; antenna efficiency; dielectric constant; silicon wafer; surface wave; Arrays; Microstrip; Microstrip antenna arrays; Microstrip antennas; Silicon; Substrates; HFSS; K band; MEMS; Silicon-based; planar microstrip array antenna;
Conference_Titel :
Microelectronics and Electronics (PrimeAsia), 2010 Asia Pacific Conference on Postgraduate Research in
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-6735-8
Electronic_ISBN :
978-1-4244-6736-5
DOI :
10.1109/PRIMEASIA.2010.5604887