Effect of Passivation and Passivation Defects on Electromigration Failure in Aluminum Metallization

Metal line structures with intentional defects in the passivation, to simulate cracks or pin holes, were used in electromigration studies. Results show that the stress changes in the metallization caused by these defects are not as important as the restraining action of the passivation in affecting a metallization´s resistance to electromigration failure. Also, the observed effects of restorative forces acting on the metallization suggests that continuous monitoring for open-circuit failure may be necessary to obtain an accurate measure of the mean-time-to-failure.