DocumentCode
2613574
Title
Acoustic Emission Study of Electromigration Damage in Al-Cu Thin Film Conductor Stripes
Author
Severn, E.T. ; Huston, H.H. ; Lloyd, J.R.
Author_Institution
IBM East Fishkill Facility, Hopewell Junction, NY 12533
fYear
1984
fDate
30773
Firstpage
256
Lastpage
258
Keywords
Acoustic emission; Acoustic signal detection; Acoustic testing; Conductive films; Conductors; Electromigration; Integrated circuit testing; Passivation; Temperature; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1984. 22nd Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1984.362055
Filename
4208579
Link To Document