Title :
Acoustic Emission Study of Electromigration Damage in Al-Cu Thin Film Conductor Stripes
Author :
Severn, E.T. ; Huston, H.H. ; Lloyd, J.R.
Author_Institution :
IBM East Fishkill Facility, Hopewell Junction, NY 12533
Keywords :
Acoustic emission; Acoustic signal detection; Acoustic testing; Conductive films; Conductors; Electromigration; Integrated circuit testing; Passivation; Temperature; Transistors;
Conference_Titel :
Reliability Physics Symposium, 1984. 22nd Annual
Conference_Location :
Las Vegas, NV, USA
DOI :
10.1109/IRPS.1984.362055