DocumentCode

2613630

Title

The Physics and Reliability of Fusing Polysilicon

Author

Ito, A. ; George, E. W (Pete) ; Lowry, R.K. ; Swasey, H.A.

fYear

1984

fDate

30773

Firstpage

279

Lastpage

279

Keywords

Indium tin oxide; Physics; Video recording;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1984. 22nd Annual

Conference_Location

Las Vegas, NV, USA

ISSN

0735-0791

Type

conf

DOI

10.1109/IRPS.1984.362059

Filename

4208583